S. Spirkovitch: search on Z-Library

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1

Preliminary results on a silicon gyrometer based on acoustic mode coupling in small cavities

Bourouina, T., Exertier, A., Spirkovitch, S., Chaumet, B., Pleska, E.

Journal:

Journal of Microelectromechanical Systems

Year:

1997

Language:

english

File:

PDF, 294 KB

english, 1997

2

A new condenser microphone with a p+ silicon membrane

T. Bourouina, S. Spirkovitch, F. Baillieu, C. Vauge

Journal:

Sensors and Actuators A: Physical

Year:

1992

Language:

english

File:

PDF, 774 KB

english, 1992

3

Integrated magnetic field sensor

E. Donzier, O. Lefort, S. Spirkovitch, F. Baillieu

Journal:

Sensors and Actuators A: Physical

Year:

1991

Language:

english

File:

PDF, 528 KB

english, 1991

4

Silicon etching techniques and application to mechanical devices

T. Bourouina, S. Spirkovitch, F. Marty, F. Baillieu, E. Donzier

Journal:

Applied Surface Science

Year:

1993

Language:

english

File:

PDF, 1010 KB

english, 1993

5

Detection and titration of ozone using metallophthalocyanine based field effect transistors

M Bouvet, A Leroy, J Simon, F Tournilhac, G Guillaud, P Lessnick, A Maillard, S Spirkovitch, M Debliquy, A de Haan, A Decroly

Journal:

Sensors and Actuators B: Chemical

Year:

2001

Language:

english

File:

PDF, 303 KB

english, 2001

6

Phthalocyanine-based field-effect transistor as ozone sensor

Marcel Bouvet, Gérard Guillaud, Arnaud Leroy, André Maillard, Serge Spirkovitch, François-Genès Tournilhac

Journal:

Sensors and Actuators B: Chemical

Year:

2001

Language:

english

File:

PDF, 248 KB

english, 2001

7

A new technique for the fabrication of thin silicon radiation detectors

Foulon, F., Rousseau, L., Babadjian, L., Spirkovitch, S., Brambilla, A., Bergonzo, P.

Journal:

IEEE Transactions on Nuclear Science

Year:

1999

Language:

english

File:

PDF, 406 KB

english, 1999

8

[IEEE [1992] Proceedings IEEE Micro Electro Mechanical Systems - Travemunde, Germany (1992.02.4-1992.02.7)] [1992] Proceedings IEEE Micro Electro Mechanical Systems - Bias dependent etching of polysilicon mixed monocrystalline-polycrystalline silicon structures

Riou, J.C., Spirkovitch, S., Sangouard, P., Baillieu, B.

Year:

1992

Language:

english

File:

PDF, 402 KB

english, 1992

9

[IEEE Third International Workshop on Design of Mixed-Mode Integrated Circuits and Applications - Puerto Vallarta, Mexico (26-28 July 1999)] Proceedings of the Third International Workshop on Design of Mixed-Mode Integrated Circuits and Applications (Cat. No.99EX303) - A CMOS, self-biased charge amplifier

Amendola, G., Blanchard, Y., Exertier, A., Spirkovitch, S., Lu, G., Alquie, G.

Year:

1999

Language:

english

File:

PDF, 307 KB

english, 1999

10

Finite-element analysis of rotor stability in an axial-drive micromotor

Milne, N G, Beerschwinger, U, Yang, S J, Reuben, R L, Mathieson, D, Ziad, H, Spirkovitch, S

Journal:

Journal of Micromechanics and Microengineering

Year:

1994

Language:

english

File:

PDF, 897 KB

english, 1994

11

SPIE Proceedings [SPIE Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS - Paris, France (Tuesday 9 May 2000)] Design, Test, Integration, and Packaging of MEMS/MOEMS - Efficient reduced order modeling for system simulation of micro-electro-mechanical systems (MEMS) from FEM models

Affour, Bachar, Nachtergaele, Philippe, Spirkovitch, Stevan, Ostergaard, Dale, Gyimesi, Miklos P., Courtois, Bernard, Crary, Selden B., Gabriel, Kaigham J., Karam, Jean Michel, Markus, Karen W., Tay,

Year:

2000

Language:

english

File:

PDF, 292 KB

english, 2000

12

[IEEE 1998 IEEE Nuclear Science Symposium Conference Record - Toronto, Ont., Canada (8-14 Nov. 1998)] 1998 IEEE Nuclear Science Symposium Conference Record. 1998 IEEE Nuclear Science Symposium and Medical Imaging Conference (Cat. No.98CH36255) - A new technique for the fabrication of thin silicon radiation detectors

Foulon, F., Rousseau, L., Babadjian, L., Spirkovitch, S., Brambilla, A., Bergonzo, P.

Year:

1998

Language:

english

File:

PDF, 266 KB

english, 1998

13

SPIE Proceedings [SPIE Asia Pacific Symposium on Microelectronics and MEMS - Gold Coast, Australia (Wednesday 27 October 1999)] Electronics and Structures for MEMS - Self-biased transconductance amplifier

Amendola, Gilles, Blanchard, Yves, Exertier, Anne, Spirkovitch, Serge, Lu, Guo N., Alquie, George, Bergmann, Neil W., Reinhold, Olaf, Tien, Norman C.

Year:

1999

Language:

english

File:

PDF, 404 KB

english, 1999

14

SPIE Proceedings [SPIE Optics Quebec - Quebec City, Canada (Monday 16 August 1993)] Laser-Assisted Fabrication of Thin Films and Microstructures - Novel process for the fabrication of top-drive double stator micromotor on glass

Ziad, Hocine, Spirkovitch, Serge, Marty, Jeannine, Baillieu, Francois, Rigo, Serge, Milne, Neil, Boyd, Ian W.

Year:

1994

Language:

english

File:

PDF, 1.20 MB

english, 1994

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